JPS553679B2 - - Google Patents

Info

Publication number
JPS553679B2
JPS553679B2 JP9584473A JP9584473A JPS553679B2 JP S553679 B2 JPS553679 B2 JP S553679B2 JP 9584473 A JP9584473 A JP 9584473A JP 9584473 A JP9584473 A JP 9584473A JP S553679 B2 JPS553679 B2 JP S553679B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP9584473A
Other languages
Japanese (ja)
Other versions
JPS5045662A (en]
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP9584473A priority Critical patent/JPS553679B2/ja
Priority to GB3657874A priority patent/GB1454919A/en
Priority to DE2440088A priority patent/DE2440088C3/de
Priority to US05/500,345 priority patent/US3935486A/en
Publication of JPS5045662A publication Critical patent/JPS5045662A/ja
Publication of JPS553679B2 publication Critical patent/JPS553679B2/ja
Expired legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70691—Handling of masks or workpieces
    • G03F7/70716—Stages
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q1/00—Members which are comprised in the general build-up of a form of machine, particularly relatively large fixed members
    • B23Q1/25—Movable or adjustable work or tool supports
    • B23Q1/26—Movable or adjustable work or tool supports characterised by constructional features relating to the co-operation of relatively movable members; Means for preventing relative movement of such members
    • B23Q1/34—Relative movement obtained by use of deformable elements, e.g. piezoelectric, magnetostrictive, elastic or thermally-dilatable elements
    • B23Q1/36—Springs
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G54/00—Non-mechanical conveyors not otherwise provided for
    • B65G54/02—Non-mechanical conveyors not otherwise provided for electrostatic, electric, or magnetic
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C29/00—Bearings for parts moving only linearly
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K13/00—Apparatus or processes specially adapted for manufacturing or adjusting assemblages of electric components
    • H05K13/0015—Orientation; Alignment; Positioning
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C2322/00—Apparatus used in shaping articles
    • F16C2322/39—General buildup of machine tools, e.g. spindles, slides, actuators

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Machine Tool Units (AREA)
  • Details Of Measuring And Other Instruments (AREA)
  • Vibration Prevention Devices (AREA)
  • Microscoopes, Condenser (AREA)
JP9584473A 1973-08-27 1973-08-27 Expired JPS553679B2 (en])

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP9584473A JPS553679B2 (en]) 1973-08-27 1973-08-27
GB3657874A GB1454919A (en) 1973-08-27 1974-08-20 Finely adjustable table device
DE2440088A DE2440088C3 (de) 1973-08-27 1974-08-21 Tisch mit Feineinstellung
US05/500,345 US3935486A (en) 1973-08-27 1974-08-26 Finely adjustable table assembly

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9584473A JPS553679B2 (en]) 1973-08-27 1973-08-27

Publications (2)

Publication Number Publication Date
JPS5045662A JPS5045662A (en]) 1975-04-23
JPS553679B2 true JPS553679B2 (en]) 1980-01-26

Family

ID=14148671

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9584473A Expired JPS553679B2 (en]) 1973-08-27 1973-08-27

Country Status (4)

Country Link
US (1) US3935486A (en])
JP (1) JPS553679B2 (en])
DE (1) DE2440088C3 (en])
GB (1) GB1454919A (en])

Families Citing this family (47)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4056760A (en) * 1973-02-19 1977-11-01 Ernst Leitz G.M.B.H. Method of driving a two coordinate oscillator and circuit arrangement therefor
US4129844A (en) * 1977-07-14 1978-12-12 Thomas H. Hudson Multi-directional positioner
DE2800340C2 (de) * 1978-01-04 1984-10-31 MTA Központi Fizikai Kutato Intezete, Budapest Einstellvorrichtung, insbesondere für optische Messungen
DE2918100A1 (de) * 1979-05-04 1980-11-13 Siemens Ag Automatisiertes justieren in der feinwerktechnik
JPS58175020A (ja) * 1982-04-05 1983-10-14 Telmec Co Ltd 二次元精密位置決め装置
JPS5956888A (ja) * 1982-09-22 1984-04-02 Tokyo Erekutoron Kk 二次元駆動装置
US4536690A (en) * 1982-10-19 1985-08-20 Calspan Corporation Tool-supporting self-propelled robot platform
US4506204A (en) * 1983-06-10 1985-03-19 The Perkin-Elmer Corporation Electro-magnetic apparatus
US4506205A (en) * 1983-06-10 1985-03-19 The Perkin-Elmer Corporation Electro-magnetic alignment apparatus
US4485339A (en) * 1983-06-10 1984-11-27 The Perkin-Elmer Corporation Electro-magnetic alignment device
US4507597A (en) * 1983-06-10 1985-03-26 The Perkin-Elmer Corporation Electro-magnetic alignment assemblies
DE3343340C1 (de) * 1983-11-30 1985-06-13 Max Planck Gesellschaft Linearverstellvorrichtung
US4514674A (en) * 1983-12-22 1985-04-30 International Business Machines Corporation Electromagnetic X-Y-Theta precision positioner
NL8500930A (nl) * 1985-03-29 1986-10-16 Philips Nv Verplaatsingsinrichting met voorgespannen contactloze lagers.
JPS62108185A (ja) * 1985-11-06 1987-05-19 大日本スクリ−ン製造株式会社 移動テ−ブル装置
DE3732566A1 (de) * 1986-09-26 1988-04-07 Fraunhofer Ges Forschung Feinpositioniermodul
IT1221550B (it) * 1987-10-30 1990-07-12 Elleci Trimate Sas Di Cassanel Apparecchiatura perfezionata per la lappatura di interni
US4952858A (en) * 1988-05-18 1990-08-28 Galburt Daniel N Microlithographic apparatus
DE4101378A1 (de) * 1991-01-18 1992-07-23 Erowa Ag Vorrichtung zur feineinstellung der gegenseitigen lage zweier miteinander verbundener apparateteile
US5874820A (en) 1995-04-04 1999-02-23 Nikon Corporation Window frame-guided stage mechanism
US5528118A (en) 1994-04-01 1996-06-18 Nikon Precision, Inc. Guideless stage with isolated reaction stage
US7365513B1 (en) 1994-04-01 2008-04-29 Nikon Corporation Positioning device having dynamically isolated frame, and lithographic device provided with such a positioning device
US6989647B1 (en) * 1994-04-01 2006-01-24 Nikon Corporation Positioning device having dynamically isolated frame, and lithographic device provided with such a positioning device
US6246204B1 (en) * 1994-06-27 2001-06-12 Nikon Corporation Electromagnetic alignment and scanning apparatus
US5623853A (en) * 1994-10-19 1997-04-29 Nikon Precision Inc. Precision motion stage with single guide beam and follower stage
US6008500A (en) * 1995-04-04 1999-12-28 Nikon Corporation Exposure apparatus having dynamically isolated reaction frame
TW318255B (en]) 1995-05-30 1997-10-21 Philips Electronics Nv
US5760564A (en) * 1995-06-27 1998-06-02 Nikon Precision Inc. Dual guide beam stage mechanism with yaw control
DE19628921C2 (de) * 1995-10-02 2000-02-24 Wiemers Karl Heinz Werkzeugmaschine mit mittels Magnetkräften spann- und positionierbarer Spanneinrichtung
DE19829580A1 (de) * 1998-07-02 2000-01-05 Bosch Gmbh Robert Vorrichtung zur mechanischen Ausrichtung eines Trägersubstrats für elektronische Schaltungen
US6144118A (en) * 1998-09-18 2000-11-07 General Scanning, Inc. High-speed precision positioning apparatus
US6437463B1 (en) 2000-04-24 2002-08-20 Nikon Corporation Wafer positioner with planar motor and mag-lev fine stage
US6405659B1 (en) 2000-05-01 2002-06-18 Nikon Corporation Monolithic stage
US6906334B2 (en) * 2000-12-19 2005-06-14 Nikon Corporation Curved I-core
US6750625B2 (en) 2001-08-15 2004-06-15 Nikon Corporation Wafer stage with magnetic bearings
US20080266037A1 (en) * 2004-06-17 2008-10-30 Mark Williams Magnetic Levitation Lithography Apparatus and Method
US20070267995A1 (en) * 2006-05-18 2007-11-22 Nikon Corporation Six Degree-of-Freedom Stage Apparatus
US20080024749A1 (en) * 2006-05-18 2008-01-31 Nikon Corporation Low mass six degree of freedom stage for lithography tools
US7728462B2 (en) * 2006-05-18 2010-06-01 Nikon Corporation Monolithic stage devices providing motion in six degrees of freedom
US20080285004A1 (en) * 2007-05-18 2008-11-20 Nikon Corporation Monolithic, Non-Contact Six Degree-of-Freedom Stage Apparatus
KR100851058B1 (ko) * 2007-09-03 2008-08-12 한국기계연구원 기계장치의 평면 스테이지 이동장치
US7597475B1 (en) * 2008-09-18 2009-10-06 Uchicago Argonne, Llc Multidimensional alignment apparatus for hard x-ray focusing with two multilayer laue lenses
US8459622B2 (en) * 2010-04-21 2013-06-11 Seagate Technology Llc Noncontact positioning of a workpiece
JP6369741B2 (ja) * 2014-01-31 2018-08-08 埼玉県 位置決め機構
CN105045042B (zh) * 2015-04-23 2017-06-16 清华大学 一种硅片台曝光区域六自由度位移测量方法
US10100907B2 (en) * 2016-04-04 2018-10-16 Nec Corporation Deformation motion mechanism
US11947264B2 (en) 2019-05-09 2024-04-02 Asml Netherlands B.V. Guiding device

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2925503A (en) * 1956-03-06 1960-02-16 Calidyne Company Inc Vibration test apparatus
US3075100A (en) * 1956-03-06 1963-01-22 Ling Temco Electronics Inc Flexure assembly for vibration test apparatus
US3163786A (en) * 1961-05-15 1964-12-29 Mccullough And Associates Electro-mechanical transducer
US3286109A (en) * 1964-02-17 1966-11-15 Superior Electric Co Step motor damped by a viscous fluid filling
US3357511A (en) * 1965-10-11 1967-12-12 Gen Motors Corp Air cushion supported, omnidirectionally steerable, traveling magnetic field propulsion device
US3744902A (en) * 1968-10-23 1973-07-10 Siemens Ag Device for producing a photo-varnish mask
US3656014A (en) * 1971-04-08 1972-04-11 Gerber Scientific Instr Co Damping apparatus for a linear step motor having two translational degrees of freedom
US3789285A (en) * 1972-03-27 1974-01-29 Handotai Kenkyu Shinkokai Position control system using magnetic force

Also Published As

Publication number Publication date
US3935486A (en) 1976-01-27
DE2440088C3 (de) 1979-11-22
DE2440088B2 (de) 1979-03-22
GB1454919A (en) 1976-11-10
JPS5045662A (en]) 1975-04-23
DE2440088A1 (de) 1975-03-06

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